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Technological Development / Mass Production Technology which respond to micro fabrication needs

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Mask Blanks
Large Mask Blanks
Functional Devices
 

ULCOAT is located in Chichibu-city, Saitama prefecture, the perfect environment blessing with full of pure water and air that require to produce world's highest level of semiconductor products. The core is the coating technology = sputtering techonology that the company is named after. Sputtering in the electronics field has its stage in the world of micron = μm (micrometer, 1/1,000mm) or even nanometer = nm (1/1,000,000mm). Chrome sputtering for photomask blanks requires 5 nm uniformity within a plate. ULCOAT meets such severe specification with cutting-edge sputtering systems and inspection tools. We are leading the fields of photomask blanks and FPD in the world as well as responding to customers' requests and expectation.

 

Leading Semiconductor Mask Blanks

We develop half tone mask blanks and thin film chrome mask blanks.

Large Half Tone Mask Blanks

We are working on reducing defectiveness and corresponding to various kinds of transmittance of large half tone mask blanks.

MEMS Foundry

With the fusion of the Si MEMS technology and the MEMS technology, we are promoting the development of dream devices, for example, a micro valve for micro chemical system, that can't produce without the other device.

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