Our company was founded on January 1st, 1979, when the SI Division of Japan Vacuum Technology (now ULVAC) was separated and became independent.
| 1970 | Began prototyping and developing mask blanks. |
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| 1972 | Began the sale of the world first mask blanks. |
| 1973 | Began exporting mask blanks to the United States. (At that time, the company was known as Japan Vacuum Technology Co., Ltd.) |
| 1979 | ULVAC Coating Corporation was established as an independent entity after the separation of the SI Division of Japan Vacuum Technology (now ULVAC). The headquarters and factory were moved to the current location in Chichibu-city. |
| 1986 | Merged with Kyushu Vacuum Metallurgy Co., Ltd. and Inabata & Co., Ltd., establishing IHT Corp. in the United States. Developed and began selling dry etching equipment for masks. |
| 1988 | Started manufacturing chrome film (BM) for FPD (Flat Panel Display) color filters. |
| 1995 | Started manufacturing phase shift mask blanks. |
| 2001 | Established ULCOAT TAIWAN, Inc. |
| 2005 | Acquired Fine Surface Technology Co., Ltd. (glass polishing) as a subsidiary. |
| 2006 | Began selling glass MEMS products. |
| 2010 | Started selling halftone mask blanks for FPD. |
| 2013 | Started selling phase shift mask blanks for FPD. |
| 2018 | Established ULVAC Coating Technology (HEFEI) Co., Ltd. |