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Technological Development / Mass Production Technology which respond to micro fabrication needs

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Mask Blanks
Large Mask Blanks
Functional Devices
MEMS Foundry

Cutting Edge Manufacturing of Large Mask Blanks

Large Mask Blanks image

TFT-LCD and flat panel displays have become larger in size and emerged as mainstream, replacing a cathode ray tube. Asian countries including Japan are leaders in the display industry. ULCOAT provides numbers of large mask blanks which are essential lithography materials in the production of FPD and has gotten a high reputation in the FPD market. Larger size plates need automation production lines to achieve higher quality and more volume. We have years of experience with automation technology for such plates.

Large Chrome Mask Blanks

Features
ULCOAT's mask blanks are high grade mask blanks with low defect such as PH・particles and are compatible with ultra precise pattern.
Superior Optical Properties
The optical properties (OD・R・ET) variation in a plate is very low.
Resist Coating
The thickness variation of resist film on a plate is very small.
Size
Maximum size 2100mm×2500mm
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Large Size Half Tone Mask Blanks

Production of Half Tone Mask Blanks Compatible With Low to High Transmittance
Half tone mask blanks are used to reduce the cost of producing CF panels. ULCOAT produce the half tone mask blanks needed to produce the half tone mask.
Size
Maximum size 2100mm×2500mm
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Mask Blanks Large Mask Blanks Functional Devices MEMS Foundry
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